Physical Vapor Deposition System for Organic Semiconductors and Metals
Anlage zur physikalischen Gasphasenabscheidung von organischen Halbleitern und Metallen mit Einbindung in ein bestehendes Gloveboxsystem, Breite der Aufstellfläche incl. Bestandsmodul (GB1000 der Firma Sylatec mit Gasreinigung) und seitlicher Servicebereiche höchstens 620cm, Aufbau und Betrieb bei einer Deckenhöhe von…
Source ID: TED-84e8aa5d-bab8-4afd-b3cc-24029f470cf0
Scope overview
Anlage zur physikalischen Gasphasenabscheidung von organischen Halbleitern und Metallen mit Einbindung in ein bestehendes Gloveboxsystem, Breite der Aufstellfläche incl. Bestandsmodul (GB1000 der Firma Sylatec mit Gasreinigung) und seitlicher Servicebereiche höchstens 620cm, Aufbau und Betrieb bei einer Deckenhöhe von 290cm (ohne Lochboden gerechnet).
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