University of Turku Procures Electron Beam Lithography Upgrade for Microscopy System
Kyseessä on Raith Elphy Quantum -laajennusosan hankinta Turun yliopiston Thermo Scientific Apreo S -kenttäemissio-pyyhkäisyelektronimikroskooppiin, mahdollistaen elektronisädelitografian olemassa olevalla laitteistolla. Elektronisädelitografia täydentää yliopiston maskittomaan valmistukseen soveltuvaa infrastruktuuria,…
Source ID: FI-HILMA-OLD-160144
Scope overview
Kyseessä on Raith Elphy Quantum -laajennusosan hankinta Turun yliopiston Thermo Scientific Apreo S -kenttäemissio-pyyhkäisyelektronimikroskooppiin, mahdollistaen elektronisädelitografian olemassa olevalla laitteistolla. Elektronisädelitografia täydentää yliopiston maskittomaan valmistukseen soveltuvaa infrastruktuuria, mahdollistamalla nanometrikokoluokassa olevien rakenteiden valmistuksen.
Elphy Quantum -päivityspaketti sisältää tietokoneen, joka on laitevalmistajan (Raith GmbH, Saksa) puolesta varustettu lisäkortilla sekä ohjelmistolla, jolla voidaan ulkoisesti ohjata yliopiston Apreo-mikroskooppia. Tämän avulla on mahdollista käyttää elektronisädettä sopivien fotoresistien kanssa erilaisille substraateille haluttujen rakenteiden valottamiseen ilman maskeja.
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