Custom Silicon Membrane Grating Devices Fabrication Request for Quotation

SLAC National Accelerator Laboratory is operated by Stanford University for the Department of Energy. As a management and operating contractor, subcontracts awarded by the Laboratory are not Federal procurements, and are not directly subject to the Federal Acquisition Regulations in 48 CFR.

Nonetheless, certain Federal laws, Executive Orders, and regulations may affect our DOE approved purchasing system, as required by statute, regulation, or contract terms and conditions This is a formal request for quotation from Procurement as requirement has been assigned to me as a buyer.

**Please do not contact the requester regarding the item(s) in this request while we are in the process of bidding to maintain the integrity of this solicitation. Please review the quote and provide your best and final offer for both price and lead-time. Kindly also have the quotation revised to today’s date and address the quote to my attention.

The following has been attached for you to complete and review : (BAA) Buy American Act Certification Representations & Certifications Rider Confirm Attached SLAC terms are accepted: FP Commercial Supplies-Services T&Cs (August 2023) Required item(s) listed below : Qty: 1 lot of 10-20 units - product description: custom silicon membrane grating devices fabrication Quote is for product only; no on-site services permitted.

Source selection will be based on Lowest Price and Technically Acceptable Method (LPTA). Technical evaluation criteria are as follows: -Frame Type: Low-Res Single Crystal Silicon -Frame Dimensions: To fit 3mm dia. -Frame Thickness: 200μm or 300μm (±10μm) thick. Only 1 thickness will be selected such that it fits in both Stanford and LBNL equipment.

-Membrane Type: Single Crystal Silicon -Membrane Dimensions: 0.05mm x 0.05mm (±0.01mm) -Membrane Array: 2 x 2 square, 0.1mm center-to-center pitch, centered to the frame. -Membrane Thickness: 90nm (±5nm) -Window Dimensions: Approximately 0.25mm x 0.25mm. Comprised of a silicon oxynitride mesh surrounding, above and below the membrane to protect it and keep it flat, approximately centered to the membrane.

-Patterning: Designs will be patterned in the membranes following design files provided by SLAC (“20251105_RandomContacts.gds”, “20251105_RandomVias.gds”, and “20251105_TestMask.gds”). These designs will have critical dimensions of 250nm (±25nm), and will have a depth of approximately 45nm, halfway through the membrane. Sidewalls may not be perfectly vertical, and roughness will not be known until time of delivery.

3 of 4 membranes will be patterned with gratings on each chip, and one membrane will be plain, unpatterned. -Based on the nature of this project, extra Quality Control is required. • Inspect all devices under optical microscopy prior to packing.

• Witness devices will be inspected with relevant techniques (SEM, TEM, FIB, Optical Surface profilometry, etc.) • Images of the device structure will be shared at the end of this project • All devices cleaned and sealed in a cleanroom environment before shipping. Please provide a price and lead time quotation by COB 1/20/2025. (15 days) Send quote to AnthonyC @SLAC.stanford.edu .

The bid closing date for this requirement is 12/20/2025. Is there any room for additional discount such as for Academic, ICPT, GSA, or Government Institutions? If possible, please provide a link to your webpage for published price list to substantiate for the prices quoted. Buy American Act Certification (BAA) applies to awards that are over $10,000. Representations & Certifications Rider is required .

Once completed the Reps and Certs is valid for one year until renewal. If you have already completed one within the year please disregard. Otherwise, please complete and return. All subcontractors are required to register in the System for Award Management ( www.sam.gov ). The resulting purchase order will be issued on a fixed price basis.

SLAC National Accelerator Laboratory Terms and Conditions for Fixed Price Commercial Supplies and Services (Rev. August 2023) will be made a part of the resulting order.

Payment Terms will be NET-30 Freight terms will be FOB Destination Prepaid and Add For foreign vendors: Shipment will be made CIP SLAC, Menlo Park, and Duty Unpaid You are requested to mark and identify proprietary/confidential information provided in response to the solicitation. Contact me directly with any questions.

Kind regards, Anthony Chin Procurement Commodities Team anthonyc@slac.stanford.edu SLAC National Accelerator Laboratory 2575 Sand Hill Road Menlo Park, CA 94025