Nanostructured Silicon Grating Beam Splitter for X-ray Applications
Kinoform Beam Splitter: Nanostructured Silicon Grating for beam splitting with the following paramenters: Pitch: 150mm Design energy: 9600 eV Contrast material: Silicon Grating structure on chip: ~500 um x 4000 um Structure height: 5 um Substrate frame size: 15 mm x 15 mm Substrate membrance material: Silicon
Source ID: f53c125221614ed2a7b64ada41b5e2e5
Scope overview
Kinoform Beam Splitter: Nanostructured Silicon Grating for beam splitting with the following paramenters: Pitch: 150mm Design energy: 9600 eV Contrast material: Silicon Grating structure on chip: ~500 um x 4000 um Structure height: 5 um Substrate frame size: 15 mm x 15 mm Substrate membrance material: Silicon
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