Wafer Probers for Millimeter Wave Circuit Characterization up to 250 GHz
2 pieces: Prober 300mm For the automated characterization of circuits in the millimetre wave range up to approx. 250 GHz by means of S-parameter and power measurements, two wafer probers are required that meet the highest requirements for positioning accuracy. Contact areas ("pads") of approx. 10µm must be able to be a…
Source ID: TED-3470dab6-6f68-42c5-8fad-75d3b14b0453
Scope overview
2 pieces: Prober 300mm For the automated characterization of circuits in the millimetre wave range up to approx. 250 GHz by means of S-parameter and power measurements, two wafer probers are required that meet the highest requirements for positioning accuracy. Contact areas ("pads") of approx. 10µm must be able to be approached precisely and with high reproducibility over a "wafer" area of ø300 mm.
As the height of these wafers can vary by approx. ±10µm, automatic height correction (Z-profiling) is required. Temperature control of the chuck is necessary.
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