University Seeks UV Nanoimprint Lithography System for Advanced Research
The School of Physics and Astronomy requires a UV nanoimprint lithography system with capability to replicate sub-micron scale structures in thin films of commercial photoresits, custom-designed photoresists and organic semiconductors. The system must have capability to align both nanoimprint stamps and photolithograph…
Source ID: UK-FTS-ocds-h6vhtk-0613d1
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Scope overview
The School of Physics and Astronomy requires a UV nanoimprint lithography system with capability to replicate sub-micron scale structures in thin films of commercial photoresits, custom-designed photoresists and organic semiconductors. The system must have capability to align both nanoimprint stamps and photolithography masks to existing features on a sample.
The unit must come with toolings for holding both soft stamps for nanoimprint lithography and photomasks for conventional UV photolithography, and sample chucks suitable for a range of sample sizes from 10 mm x 10 mm chips to full wafers. Stage: tender Procurement method: Open procedure
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University Seeks UV Nanoimprint Lithography System for Advanced Research
A university physics and astronomy department is procuring a UV nanoimprint lithography system capable of replicating sub-micron structures in various materials including commercial and custom photoresists. The system must feature alignment capabilities for both nanoimprint stamps and photolithography masks to existing sample features. Required accessories include tooling for soft stamps and photomasks, plus sample chucks accommodating sizes from small chips to full wafers.
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