University Seeks UV Nanoimprint Lithography System for Advanced Research
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Source ID: UK-PCS-ocds-r6ebe6-0000821851
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As published by the source; may be updated by the buyer.
Scope overview
The School of Physics and Astronomy requires a UV nanoimprint lithography system with capability to replicate sub-micron scale structures in thin films of commercial photoresits, custom-designed photoresists and organic semiconductors. The system must have capability to align both nanoimprint stamps and photolithography masks to existing features on a sample.
The unit must come with toolings for holding both soft stamps for nanoimprint lithography and photomasks for conventional UV photolithography, and sample chucks suitable for a range of sample sizes from 10 mm x 10 mm chips to full wafers.
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